Optimize Subfab Sealing: Achieve Superior Performance and Cost Savings with Fusion F07 Fluoroelastomer

The escalating complexity of semiconductor manufacturing demands advanced sealing solutions that can withstand increasingly harsh subfab environments. Traditional fluoroelastomers (FKMs) often fall short, while perfluoroelastomers (FFKMs) come with a significant cost premium.

Introducing Greene Tweed’s Fusion F07, an enhanced fluoroelastomer specifically engineered to address the critical challenges of subfab sealing applications. Discover how Fusion F07 delivers high performance without the elevated cost of FFKMs, providing:

• Exceptional chemical and plasma resistance: Designed to withstand corrosive, exotic, and highly reactive gases, including damaging plasma, which breaks down conventional FKM polymers.
• High-temperature endurance: Capable of withstanding excursion temperatures up to 220°C (428°F) and continuous service temperatures of 180°C (356°F).
• Cost-effective operation: Fusion F07 offers a lower cost of operation compared to premium sealing materials, enabling you to reduce unplanned maintenance events and impact on production.
• Robust material design: Learn about the optimized polymer (Type 2 high fluorine terpolymer), peroxide cure system (low metal content), and high fluorine organic polymeric filler that contribute to F07’s superior properties.

Download this white paper to explore the technical advancements of Fusion F07 and understand how it can enhance the reliability and efficiency of your subfab sealing applications.

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